Flow Meter & Nozzle in Semiconductor

1. Basic Definitions and Core Values of Semiconductors

Semiconductors are critical materials with conductive properties between those of conductors and insulators at room temperature, enabling precise control of electrical conductivity. They serve as the cornerstone of modern electronics industries, with silicon being the most widely used application material that supports the operation of various electronic devices including mobile phones, computers, and spacecraft, thereby constituting the core carrier for information technology development.

2. Core Relationship Between ICs and Semiconductors

An IC (Integrated Circuit) is a miniature circuit that integrates components such as transistors, resistors, and capacitors onto a semiconductor silicon wafer, serving as the core application form in the semiconductor industry. The relationship between these two elements resembles that of fundamental materials and integrated applications: semiconductors act as the core substrate material for IC manufacturing, while ICs serve as the ultimate product carriers where semiconductor value is realized, enabling core electronic functions including computation, storage, and control.

3. Core Role of Flowmeters and Nozzles in the Semiconductor Industry

Semiconductor manufacturing is centered on nanoscale precision processes. Flow meters and nozzles serve as critical fluid control components throughout the entire wafer fabrication and chip packaging process, directly determining chip yield, performance, and production efficiency, and constitute a vital support for high-quality industrial development.

· Flowmeter: The precision metering device for semiconductor processes, responsible for high-precision measurement of microflows in gas-liquid media such as developer solutions, etching solutions, nitrogen, and silane. It is compatible with highly corrosive and viscous operating conditions, correcting flow deviations through closed-loop control to ensure stable critical processes like thin film deposition and etching, thereby reducing production defects and costs.

· Nozzle: The microscopic actuator in semiconductor precision processing, achieving ultra-fine atomization and uniform spraying of media during wet cleaning and photoresist coating processes. It efficiently removes wafer contaminants and ensures precise photoresist deposition, compatible with advanced processes including 3D NAND and 7nm and below. The nozzle addresses cleaning dead zones in high aspect ratio structures, thereby reducing product defect density.

4. Guangdong Zhongguan Fluid Technology Products Empower Semiconductor Industry Extension

Guangdong Zhongguan Fluid Technology specializes in high-precision fluid measurement and precision injection component R&D, production, and customized solutions. Its core products are deeply integrated with semiconductor manufacturing scenarios, serving as a critical support for domestic semiconductor fluid control systems.

Zhongguan High-Precision Flowmeter: Strengthening the Measurement Defense Line for Semiconductor Processes

1. The product portfolio comprehensively addresses diverse application scenarios, featuring micro-flow liquid flow meters, corrosion-resistant gas flow meters, and specialized flow meters for high-viscosity media. These solutions precisely meet measurement requirements for various media in semiconductor manufacturing processes—including developing solutions, photoresists, and specialty process gases—effectively resolving traditional flow meter limitations such as accuracy degradation and stability issues under extreme corrosive conditions or ultra-low flow rates.

2. The core technology matches nanoscale process measurement accuracy reaching industry-leading levels, supporting real-time closed-loop control of micro-flow rates and enabling rapid correction of flow fluctuations to prevent wafer circuit defects caused by measurement deviations. Utilizing corrosion-resistant and high-temperature resistant materials, it is compatible with stringent conditions such as semiconductor wet processes and thin film deposition, thereby extending component lifespan and reducing equipment maintenance costs.

3. Domestic substitution enhances supply chain autonomy by breaking the monopoly of overseas brands in the semiconductor high-precision flowmeter sector. It provides cost-effective and rapid-response localized solutions for domestic wafer fabs and packaging/testing enterprises, ensuring the security of semiconductor industry supply chains while driving cost reduction and efficiency improvements across the sector.

Zhongguan Precision Nozzle: Supporting Advanced Process Precision Machining

1. Tailored for advanced process scenarios, this solution addresses core semiconductor processes such as wet cleaning, photoresist spraying, and wafer development. It features ultra-fine atomization nozzles, high aspect ratio-specific nozzles, and anti-clogging precision nozzles with customizable aperture, spray angle, and atomization particle size. Perfectly compatible with 3D NAND, 7nm and below advanced processes, it resolves industry challenges including cleaning dead zones and uneven coating.

2. Material and Process Assurance for Optimal Performance: Utilizing high-purity, wear-resistant, and corrosion-resistant specialty materials, precision machining techniques ensure smooth and burr-free inner surfaces of nozzles to prevent medium residue contamination of wafers. The uniformity of spray distribution and atomization efficiency meet international standards for comparable products, effectively enhancing wafer cleaning efficiency and lithography process accuracy while reducing chip defect rates.

3. Large-scale application drives industrial upgrading. Products are widely adopted by domestic semiconductor equipment manufacturers and wafer fabrication lines, achieving deep integration with semiconductor wet-process equipment and adhesive-coating development systems. This enhances the core competitiveness of domestically produced semiconductor equipment and propels the industry toward higher precision, greater efficiency, and sustainable large-scale development.

Zhongguan Fluid Integrated Solution: Full-process Empowerment for the Semiconductor Industry

Guangdong Zhongguan Fluid Technology goes beyond single-component supply, offering comprehensive semiconductor fluid control solutions. By synergistically optimizing flow meters and nozzles while integrating media transportation, metering, and injection processes, the company provides end-to-end services for wafer manufacturing, chip packaging, and semiconductor equipment R&D applications.

As semiconductor manufacturing processes continue to advance toward 3nm and 2nm nodes, the demands for fluid control precision, stability, and reliability are escalating. Leveraging its technological R&D capabilities and localized service expertise, Zhongguan Fluid has been consistently upgrading high-precision flow meters and precision nozzles. By closely aligning with the evolving needs of the semiconductor industry, the company has become a pivotal force in driving domestic semiconductor fluid control components' self-reliance and fostering high-quality development across the sector.